Publications

2 results for John M. Hutchinson

Kinetics of chemically amplified resists
- - G.M. Wallraff
  - W.D. Hinsberg
  - et al.
- 1995
- Microlithography 1995
Conference paper
Kinetics of thermal and acid-catalyzed deprotection in deep-UV resist materials
- - G.M. Wallraff
  - John M. Hutchinson
  - et al.
- 1995
- Microelectronic Engineering
Paper