Publications

34 results for Oleg Gluschenkov

Impact of nanosecond laser annealing on vacancies in electroplated Cu films studied by monoenergetic positron beams
- - Akira Uedono
  - Takeshi Nogami
  - et al.
- 2023
- Journal of Applied Physics
Contact Cavity Shaping and Selective SiGe:B Low-Temperature Epitaxy Process Solution for sub 10^-9 Ω.cm² Contact Resistivity in Nonplanar FETs
- - N. Breil
  - B.-C. Lee
  - et al.
- 2023
- VLSI Technology 2023
Improving FinFET Junctions and Contacts via Laser Annealing
- - Oleg Gluschenkov
  - Yasir Sulehria
  - et al.
- 2023
- IWJT 2023
Advanced BEOL Materials, Processes, and Integration to Reduce Line Resistance of Damascene Cu, Co, and Subtractive Ru Interconnects
- - Takeshi Nogami
  - Oleg Gluschenkov
  - et al.
- 2022
- VLSI Technology and Circuits 2022
Crystallization of hafnium-oxide-based ferroelectrics for BEOL integration
- - Martin M. Frank
  - Eduard A. Cartier
  - et al.
- 2022
- EDTM 2022
Impact of Nanosecond Laser Anneal on PVD Ru Films
- - D. Sil
  - Yasir Sulehria
  - et al.
- 2021
- IITC 2021
Energy density and temperature calibration for feol nanosecond laser annealing
- - Yasir Sulehria
  - Oleg Gluschenkov
  - et al.
- 2020
- ASMC 2020
Parasitic Resistance Reduction Strategies for Advanced CMOS FinFETs beyond 7nm
- - Heng Wu
  - Oleg Gluschenkov
  - et al.
- 2018
- IEDM 2018
External Resistance Reduction by Nanosecond Laser Anneal in Si/SiGe CMOS Technology
- - Oleg Gluschenkov
  - Heng Wu
  - et al.
- 2018
- IEDM 2018
Simulation of 3D Doping by Plasma Immersion Ion Implantation for FinFET or deep Trench Doping Applications. Effect of main Process Parameters and Study of Wall Doping Non-Uniformity as Function of Form Factor and Device Scaling
- - Frank Torregrosa
  - Benjamin Roux
  - et al.
- 2018
- IIT 2018