Publications

2 results for Joseph P. Kirk

Characterization of a next generation step-and-scan system
- - Timothy J. Wiltshire
  - Joseph P. Kirk
  - et al.
- 1998
- SPIE Advanced Lithography 1998
Scattered light in photolithographic lenses
- - Joseph P. Kirk
- 1994
- Microlithography 1994

Characterization of a next generation step-and-scan system