Publications

2 results for R. Engelstad

Thermomechanical distortions of the PREVAIL mask system during exposure
- - P.-T. Lee
  - C. Martin
  - et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Predicting in-plane distortion from electron-beam lithography on x-ray mask membranes
- - D.L. Laird
  - R. Engelstad
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures