Publications

39 results for Kafai Lai

Electrical validation of the integration of 193i and DSA for sub-20nm metal cut patterning
- - Chi Chun Liu
  - Richard Farrell
  - et al.
- 2019
- MEMS/NEMS/MOEMS 2019
The integration of 193i and DSA for BEOL metal cuts/blocks targeting sub-20nm tip-to-tip CD
- - Chi-Chun Liu
  - Yann Mignot
  - et al.
- 2018
- SPIE Advanced Lithography 2018
Advanced fast 3D DSA model development and calibration for design technology co-optimization
- - Kafai Lai
  - Balint Meliorisz
  - et al.
- 2017
- SPIE Advanced Lithography 2017
DSA patterning options for logics and memory applications
- - Chi Chun Liu
  - Elliott Franke
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Electrical study of DSA shrink process and CD rectification effect at sub-60nm using EUV test vehicle
- - Cheng Chi
  - Chi Chun Liu
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Design technology co-optimization assessment for directed self-Assembly-based lithography: Design for directed self-Assembly or directed self-Assembly for design
- - Kafai Lai
  - Chi Chun Liu
  - et al.
- 2017
- J. Micro/Nanolithogr. MEMS MOEMS
Modeling and parameter tuning for templated directed self-Assembly
- - Balint Meliorisz
  - T. Mülders
  - et al.
- 2016
- SPIE Advanced Lithography 2016
DSA patterning options for FinFET formation at 7nm node
- - Chi Chun Liu
  - Elliott Franke
  - et al.
- 2016
- SPIE Advanced Lithography 2016
DSA via hole shrink for advanced node applications
- - Cheng Chi
  - Chi Chun Liu
  - et al.
- 2016
- SPIE Advanced Lithography 2016
Fin formation using graphoepitaxy DSA for FinFET device fabrication
- - Chi Chun Liu
  - Fee Li Lie
  - et al.
- 2015
- SPIE Advanced Lithography 2015