Thermal Scanning Probe Lithography (t-SPL) for Nano-Fabrication
- Heiko Wolf
- Yu Kyoung Ryu
- et al.
- 2019
- Pan Pacific 2019
Conference paper
Publications
11 results for Philip Paul
High throughput lithography using thermal scanning probes
- Colin D. Rawlings
- Martin Spieser
- et al.
- 2017
- TRANSDUCERS 2017
Conference paperThermal probe nanolithography for novel photonic devices
- Felix Holzner
- Philip Paul
- et al.
- 2015
- IPRSN 2015
Conference paperPrecision positioning for thermal scanning probe lithography
- Philip Paul
- Simon Züst
- et al.
- 2015
- EUSPEN 2015
Conference paperClosed-loop high-speed 3D thermal probe nanolithography
- Armin W. Knoll
- Michal Zientek
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paperThermal probe nanolithography: In-situ inspection, high-speed, high-resolution, 3D
- Felix Holzner
- Philip Paul
- et al.
- 2013
- EMLC 2013
Conference paperThermal probe maskless lithography for 27.5 nm half-pitch Si technology
- Lin Lee Cheong
- Philip Paul
- et al.
- 2013
- Nano Letters
PaperField stitching in thermal probe lithography by means of surface roughness correlation
- Ph. Paul
- A.W. Knoll
- et al.
- 2012
- Nanotechnology
PaperDirected placement of gold nanorods using a removable template for guided assembly
- Felix Holzner
- Cyrill Kuemin
- et al.
- 2011
- Nano Letters
PaperHigh density multi-level recording for archival data preservation
- Felix Holzner
- Ph. Paul
- et al.
- 2011
- Applied Physics Letters
Paper