Interaction of SiC thermal oxidation by-products with SiO2
- C. Radtke
- F.C. Stedile
- et al.
- 2008
- Applied Physics Letters
Publications
14 results for I.J.R. Baumvol
Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering
- R.P. Pezzi
- C. Krug
- et al.
- 2008
- Applied Physics Letters
Post deposition annealing of Hf aluminate films on Si investigated by ion backscattering and nuclear reaction analyses
- L. Miotti
- R.P. Pezzi
- et al.
- 2008
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Nuclear reaction analysis of 1H and 2H in hafnium silicate films on Si
- C. Driemeier
- R.P. Pezzi
- et al.
- 2008
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Advanced ion energy loss models: Applications to subnanometric resolution elemental depth profiling
- R.P. Pezzi
- P.L. Grande
- et al.
- 2007
- Surface Science
An analytical energy-loss line shape for high depth resolution in ion-beam analysis
- P.L. Grande
- A. Hentz
- et al.
- 2007
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Atomic transport and integrity of Al2O3(2.0 nm)/HfO2(2.5 nm) gate stacks on Si
- L. Miotti
- R.P. Pezzi
- et al.
- 2007
- Applied Physics Letters
Oxygen transport and reaction mechanisms in rhenium gate contacts on hafnium oxide films on Si
- R.P. Pezzi
- M. Copel
- et al.
- 2006
- Applied Physics Letters
Room temperature interactions of water vapor with HfO 2 films on Si
- C. Driemeier
- E. Gusev
- et al.
- 2006
- Applied Physics Letters
Characterization of HfO2/Si exposed to water vapor at room temperature
- Carlos Driemeier
- Elizandra Martinazzi
- et al.
- 2006
- MRS Spring Meeting 2006