Publications

9 results for Peter P. Longo

Overlay improvement roadmap: Strategies for scanner control and product disposition for 5-nm overlay
- - Nelson M. Felix
  - Allen H. Gabor
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Femtosecond laser ablation and deposition of metal films on transparent substrates with applications in photomask repair
- - Richard Haight
  - Alfred Wagner
  - et al.
- 2005
- Lasers and Applications in Science and Engineering 2005
High resolution material ablation and deposition with femtosecond lasers and applications to photomask repair
- - Richard Haight
  - Alfred Wagner
  - et al.
- 2004
- Journal of Modern Optics
High Resolution Material Processing with Femtosecond Lasers: Mask Repair and Beyond
- - Richard Haight
  - Alfred Wagner
  - et al.
- 2003
- FiO 2003
Metal deposition with femtosecond light pulses at atmospheric pressure
- - R. Haight
  - P. Longo
  - et al.
- 2003
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
MARS2: An advanced femtosecond laser mask repair tool
- - Alfred Wagner
  - Richard Haight
  - et al.
- 2002
- SPIE Photomask Technology 2002
MARS: Femtosecond laser mask advanced repair system in manufacturing
- - Richard Haight
  - Dennis Hayden
  - et al.
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Implementation and performance of a femtosecond laser mask repair system in manufacturing
- - R. Haight
  - Dennis Hayden
  - et al.
- 1998
- BACUS Symposium on Photomask Technology and Management 1998
Focused ion beam metrology
- - A. Wagner
  - P.G. Blauner
  - et al.
- 1995
- MRS Fall Meeting 1995