J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
Cr from adsorbed layers of Cr(CO)6 were deposited using femtosecond pulses of 400 nm light. The deposition was continually monitored with a charge coupled device camera which resides above the microscope tube lens. All experiments were carried out in air and similar results were obtained for W(CO)6 and Mo(CO)6. Both transmitted and reflected light imaging was used to monitor the opacity and reflectivity of the deposits.
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Reisman, M. Berkenblit, et al.
JES
Frank Stem
C R C Critical Reviews in Solid State Sciences