Publications

19 results for K.R. Milkove

Two-level BEOL processing for rapid iteration in MRAM development
- - Michael C. Gaidis
  - Eugene J. O'Sullivan
  - et al.
- 2006
- IBM J. Res. Dev
Recent advances in MRAM technology
- - W.J. Gallagher
  - D.W. Abraham
  - et al.
- 2005
- VLSI Technology 2005
High-capacity, self-assembled metal-oxide-semiconductor decoupling capacitors
- - Charles T. Black
  - Kathryn W. Guarini
  - et al.
- 2004
- IEEE Electron Device Letters
Dual work function metal gate CMOS using CVD metal electrodes
- - V. Narayanan
  - A.C. Callegari
  - et al.
- 2004
- VLSI Technology 2004
Analysis of an extreme low-κ organosilicate dielectric film exposed to representative plasmas and to a restorative process
- - M. Colburn
  - S.V. Nitta
  - et al.
- 2003
- AMC 2003
Nanoscale patterning using self-assembled polymers for semiconductor applications
- - K.W. Guarini
  - C.T. Black
  - et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication
- - C.T. Black
  - K.W. Guarini
  - et al.
- 2001
- Applied Physics Letters
Effects of argon addition to a platinum dry etch process
- - K.R. Milkove
  - J. Coffin
  - et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Dry etching of (Ba,Sr)TiO₃ with Cl₂, SF₆, and CF₄
- - K.R. Milkove
- 1998
- International Symposium on Integrated Ferroelectrics 1998
Numerical simulation of etching and deposition processes
- - Satoshi Hamaguchi
  - Anita A. Mayo
  - et al.
- 1997
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers