Publications

2 results for Daniel Lewellyn

Evaluation of In-line SIMS Impact on Device Reliability and Performance
- - Jander Cruz
  - Li Xiang
  - et al.
- 2026
- SPIE Advanced Lithography + Patterning 2026
Conference paper
From Lab to Fab - In-line SIMS for Process Control in Nanosheet Gate-All-Around Device Manufacturing
- - Stefan Schoeche
  - Katherine Sieg
  - et al.
- 2024
- SPIE Advanced Lithography + Patterning 2024
Conference paper