Publications

13 results for P.G. Blauner

Electromigration and diffusion in pure Cu and Cu(Sn) alloys
- - C.-K. Hu
  - K.L. Lee
  - et al.
- 1996
- MRS Spring Meeting 1996
Electromigration and diffusion in pure Cu and Cu(Sn) alloys
- - C.-K. Hu
  - K.L. Lee
  - et al.
- 1996
- MRS Spring Meeting 1996
High conductivity FIB deposited metal
- - P.G. Blauner
  - A. Wagner
- 1995
- MRS Fall Meeting 1995
Focused ion beam metrology
- - A. Wagner
  - P.G. Blauner
  - et al.
- 1995
- MRS Fall Meeting 1995
High resolution x-ray mask repair
- - P.G. Blauner
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Fabrication of high performance 512Kb SRAMs in 0.25 μm CMOS technology using x-ray lithography
- - R. Viswanathan
  - David Seeger
  - et al.
- 1994
- Microelectronic Engineering
Electromigration failure due to interfacial diffusion in fine Al alloy lines
- - C.-K. Hu
  - M.B. Small
  - et al.
- 1993
- Applied Physics Letters
Electrodeposited gold;real times stress and structural chance at room temperature
- - R.E. Acosta
  - I. Babich
  - et al.
- 1993
- MRS Spring Meeting 1993
Process latitude study of focused ion-beam-deposited gold for clear x-ray mask repair
- - Patricia G. Blauner
  - Andrew D. Dubner
  - et al.
- 1993
- Microlithography 1993
Photoresist process latitude optimization for synchrotron x-ray lithography
- - Andrew T. Pomerene
  - David E. Seeger
  - et al.
- 1993
- Microlithography 1993