On the use of alloying elements for Cu interconnect applications
- K. Barmak
- C. Cabral
- et al.
- 2006
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Publications
22 results for K. Barmak
Resistivity-temperature behavior of dilute Cu(Ir) and Cu(W) alloy films
- Katayun Barmak
- Jr. Cabral
- et al.
- 2005
- Journal of Materials Research
On the relationship of magnetocrystalline anisotropy and stoichiometry in epitaxial L1 0 CoPt (001) and FePt (001) thin films
- K. Barmak
- J. Kim
- et al.
- 2005
- Journal of Applied Physics
Stoichiometry-anisotropy connections in epitaxial L1 0 FePt(001) films
- Katayun Barmak
- Jihwan Kim
- et al.
- 2004
- Journal of Applied Physics
Texture of Cu and dilute binary Cu-alloy films: Impact of annealing and solute content
- K. Barmak
- A. Gungor
- et al.
- 2003
- Materials Science in Semiconductor Processing
Annealing behavior of Cu and dilute Cu-alloy films: Precipitation, grain growth, and resistivity
- K. Barmak
- A. Gungor
- et al.
- 2003
- Journal of Applied Physics
Texture and resistivity of dilute binary Cu(Al), Cu(In), Cu(Ti), Cu(Nb), Cu(Ir), and Cu(W) allow thin films
- A. Gungor
- K. Barmak
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Metastable and equilibrium phase formation in sputter-deposited Ti/Al multilayer thin films
- G.A. Lucadamo
- K. Barmak
- et al.
- 2002
- Journal of Applied Physics
Cu and dilute binary Cu(Ti), Cu(Sn) and Cu(Al) thin films: Texture, grain growth and resistivity
- A. Gungor
- K. Barmak
- et al.
- 2002
- MRS Proceedings 2002
Texture and resistivity of Cu and dilute Cu alloy films
- K. Barmak
- A. Gungor
- et al.
- 2002
- MRS Proceedings 2002