Opportunities and challenges in ultra low k dielectrics for interconnect applications
- S. Purushothaman
- S.V. Nitta
- et al.
- 2001
- Technical Digest-International Electron Devices Meeting
Publications
10 results for S.J. Whitehair
Continuous processing of sheet-like materials by microwave energy
- D.A. Lewis
- S.J. Whitehair
- et al.
- 1996
- MRS Spring Meeting 1996
Langmuir probe measurements of a radio frequency induction plasma
- J. Hopwood
- C.R. Guarnieri
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Electromagnetic fields in a radio-frequency induction plasma
- J. Hopwood
- C.R. Guarnieri
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Enhanced nucleation and growth of diamond on SiC by plasma enhanced chemical vapor deposition using thin metal films
- J.E. Yehoda
- R.I. Fuentes
- et al.
- 1992
- Applied Physics Letters
Reaction of niobium with diamond films
- C.R. Guarnieri
- F.M. d'Heurle
- et al.
- 1991
- Applied Surface Science
Light scattering properties of x-ray lithography mask substrates
- J.R. Maldonado
- Y. Vladimirsky
- et al.
- 1991
- Microelectronic Engineering
The effects of substrate potentials on electron cyclotron resonance plasmas
- S.M. Rossnagel
- S.J. Whitehair
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Internal stress and elasticity of synthetic diamond films
- B.S. Berry
- W.C. Pritchet
- et al.
- 1990
- Applied Physics Letters
Plasma induced gas heating in electron cyclotron resonance sources
- S.M. Rossnagel
- S.J. Whitehair
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films