Hydrodynamic analysis of electron motion in the cathode fall using a Monte Carlo simulation
- M. Dalvie
- R.T. Farouki
- et al.
- 1992
- Journal of Applied Physics
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20 results for Manoj Dalvie
Dynamical N-body simulations of Coulomb scattering in plasma sheaths
- R.T. Farouki
- S. Hamaguchi
- et al.
- 1992
- Physical Review A
Self-consistent Monte Carlo simulation of the cathode fall including treatment of negative-glow electrons
- Manoj Dalvie
- Satoshi Hamaguchi
- et al.
- 1992
- Physical Review A
Analysis of a kinematic model for ion transport in rf plasma sheaths
- Rida T. Farouki
- Satoshi Hamaguchi
- et al.
- 1992
- Physical Review A
Flux Considerations in the Coupling of Monte Carlo Plasma Sheath Simulations with Feature Evolution Models
- Manoj Dalvie
- Rida T. Farouki
- et al.
- 1992
- IEEE T-ED
Ion energetics in collisionless sheaths of rf process plasmas
- S. Hamaguchi
- R.T. Farouki
- et al.
- 1992
- Physics of Fluids B
Ion distribution function in a weakly collisional sheath
- S. Hamaguchi
- R.T. Farouki
- et al.
- 1991
- Physical Review A
Monte Carlo simulations of space-charge-limited ion transport through collisional plasma sheaths
- Rida T. Farouki
- Satoshi Hamaguchi
- et al.
- 1991
- Physical Review A
Boundary-condition refinement of the Child-Langmuir law for collisionless dc plasma sheaths
- Rida T. Farouki
- Manoj Dalvie
- et al.
- 1990
- Journal of Applied Physics
The importance of free radical recombination reactions in CF4 /02 plasma etching of silicon
- K.F. Jensen
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films