Hydrodynamic analysis of electron motion in the cathode fall using a Monte Carlo simulation
- M. Dalvie
- R.T. Farouki
- et al.
- 1992
- Journal of Applied Physics
Paper
Publications
20 results for Manoj Dalvie
Self-consistent Monte Carlo simulation of the cathode fall including treatment of negative-glow electrons
- Manoj Dalvie
- Satoshi Hamaguchi
- et al.
- 1992
- Physical Review A
PaperAnalysis of a kinematic model for ion transport in rf plasma sheaths
- Rida T. Farouki
- Satoshi Hamaguchi
- et al.
- 1992
- Physical Review A
PaperPonderomotive force and ion energy distributions in an rf sheath
- S. Hamaguchi
- R.T. Farouki
- et al.
- 1992
- Physical Review Letters
PaperIon energetics in collisionless sheaths of rf process plasmas
- S. Hamaguchi
- R.T. Farouki
- et al.
- 1992
- Physics of Fluids B
PaperFlux Considerations in the Coupling of Monte Carlo Plasma Sheath Simulations with Feature Evolution Models
- Manoj Dalvie
- Rida T. Farouki
- et al.
- 1992
- IEEE T-ED
PaperIon distribution function in a weakly collisional sheath
- S. Hamaguchi
- R.T. Farouki
- et al.
- 1991
- Physical Review A
PaperMonte Carlo simulations of space-charge-limited ion transport through collisional plasma sheaths
- Rida T. Farouki
- Satoshi Hamaguchi
- et al.
- 1991
- Physical Review A
PaperBoundary-condition refinement of the Child-Langmuir law for collisionless dc plasma sheaths
- Rida T. Farouki
- Manoj Dalvie
- et al.
- 1990
- Journal of Applied Physics
PaperThe importance of free radical recombination reactions in CF4 /02 plasma etching of silicon
- K.F. Jensen
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper