Combined Experimental and Modeling Study of Spatial Effects in Plasma Etching: CF4/O2 Etching of Silicon
- M. Dalvie
- K.F. Jensen
- 2019
- JES
Publications
20 results for Manoj Dalvie
Across wafer etch rate uniformity in a high density plasma reactor: Experiment and modeling
- M. Surendra
- C.R. Guarnieri
- et al.
- 1995
- Applied Physics Letters
The Gaseous Electronics Conference radio-frequency reference cell: A defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma-processing discharges
- P.J. Hargis Jr.
- K.E. Greenberg
- et al.
- 1994
- Review of Scientific Instruments
Detection and modelling of electrode topography effects on particle traps
- M. Dalvie
- M. Surendra
- et al.
- 1994
- Plasma Sources Science and Technology
Intrinsic and Passivation-Induced Trench Tapering during Plasma Etching
- S. Hamaguchi
- M. Dalvie
- 1994
- JES
A shock-tracking algorithm for surface evolution under reactive-ion etching
- S. Hamaguchi
- M. Dalvie
- et al.
- 1993
- Journal of Applied Physics
Self-consistent fluid modeling of radio frequency discharges in two dimensions
- M. Dalvie
- M. Surendra
- et al.
- 1993
- Applied Physics Letters
Detection of particle traps by spatially resolved optical emission spectroscopy over grooved electrodes in radio frequency discharges
- M. Dalvie
- G.S. Selwyn
- et al.
- 1993
- Applied Physics Letters
Moment analysis of rf parallel-plate-discharge simulations using the particle-in-cell with Monte Carlo collisions technique
- M. Surendra
- M. Dalvie
- 1993
- Physical Review E
Hydrodynamic analysis of electron motion in the cathode fall using a Monte Carlo simulation
- M. Dalvie
- R.T. Farouki
- et al.
- 1992
- Journal of Applied Physics