Reacted amorphous layers: Tantalum and niobium oxides
- O. Thomas
- F.M. D’Heurle
- et al.
- 2006
- Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties
Paper
Publications
14 results for A. Charai
Interfacial reactions between Al and RuO2, MoOx and WNx diffusion barriers on Si
- S.-E. Hörnström
- A. Charai
- et al.
- 2004
- Surface and Interface Analysis
PaperStability of interfaces in gold-silicon system regarding equilibrium segregation
- Andrée Rolland
- Christophe Poisson
- et al.
- 1997
- Microscopy Microanalysis Microstructures
PaperDopant diffusion in silicides: Effect of diffusion paths
- Carol Stanis
- J.M. Cotte
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperFormation of Cu3Si and its catalytic effect on silicon oxidation at room temperature
- L. Stolt
- A. Charai
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperPolytype formation in zirconium-silicon thin films
- A. Bourret
- F.M. D'Heurle
- et al.
- 1990
- Journal of Applied Physics
PaperRoom-temperature oxidation of silicon catalyzed by Cu3Si
- J.M.E. Harper
- A. Charai
- et al.
- 1990
- Applied Physics Letters
PaperNovel self-aligned W/TiN/TiSi2 contact structure for very shallow junctions and interconnections
- R.V. Joshi
- D. Moy
- et al.
- 1989
- Applied Physics Letters
PaperComparison of the diffusion barrier properties of tungsten films prepared by hydrogen and silicon reduction of tungsten hexafluoride
- O. Thomas
- A. Charai
- et al.
- 1989
- Thin Solid Films
PaperMechanisms for success or failure of diffusion barriers between aluminum and silicon
- J.M.E. Harper
- S.E. Harnstram
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper