Lithography and fabrication processes for sub-100 nm scale complementary metal-oxide semiconductor
- S.J. Wind
- Y. Taur
- et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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48 results for R.A. Roy
Properties of amorphous diamond films prepared by a filtered cathodic arc
- Richard Lossy
- David L. Pappas
- et al.
- 1995
- Journal of Applied Physics
A kinetic study of the C49 to C54 TiSi2 conversion using electrical resistivity measurements on single narrow lines
- K.L. Saenger
- C. Cabral
- et al.
- 1995
- Journal of Applied Physics
A comparison of C54-TiSi2 formation in blanket and submicron gate structures using in situ x-ray diffraction during rapid thermal annealing
- J. Bucchignano
- G.B. Stephenson
- et al.
- 1995
- Journal of Materials Research
In situ x-ray diffraction analysis of the C49-C54 titanium silicide phase transformation in narrow lines
- R.A. Roy
- L. Clevenger
- et al.
- 1995
- Applied Physics Letters
Study of C49-TiSi2 and C54-TiSi2 formation on doped polycrystalline silicon using in situ resistance measurements during annealing
- L. Clevenger
- R. Mann
- et al.
- 1994
- Journal of Applied Physics
Crystallographic evolution of microstructure in thin film processing: Part I. grain size distribution
- J. Trogolo
- R.A. Roy
- et al.
- 1994
- Journal of Electronic Materials
Phase formation and microstructure changes in tantalum thin films induced by bias sputtering
- Philippe Catania
- Ronnen A. Roy
- et al.
- 1993
- Journal of Applied Physics
The growth of crystalline vapor deposited carbon-60 thin films
- W. Krakow
- N.M. Rivera
- et al.
- 1993
- Applied Physics A Solids and Surfaces
Low energy ion-assisted deposition of metal films
- Ronnen Roy
- 1992
- Surface and Coatings Technology