Publications

50 results for V.V. Patel

Tunable anti-reflective coatings with built-in hard mask properties facilitating thin resist processing
- - Arpan P. Mahorowala
  - Katherina Babich
  - et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Ultralow-k dielectrics prepared by plasma-enhanced chemical vapor deposition
- - A. Grill
  - V.V. Patel
- 2001
- Applied Physics Letters
Tribological and mechanical properties of diamond-like carbon prepared by high-density plasma
- - J.C. Sánchez-López
  - C. Donnet
  - et al.
- 2001
- Diamond and Related Materials
Novel low-k dual-phase materials prepared by PECVD
- - A. Grill
  - V.V. Patel
- 2000
- MRS Proceedings 2000
Diamond-like carbon prepared by high density plasma
- - J.C. Sánchez-López
  - C. Donnet
  - et al.
- 2000
- Diamond and Related Materials
Low dielectric constant SiCOH films as potential candidates for interconnect dielectrics
- - A. Grill
  - L. Perraud
  - et al.
- 1999
- MRS Spring Meeting 1999
Low dielectric constant films prepared by plasma-enhanced chemical vapor deposition from tetramethylsilane
- - A. Grill
  - V.V. Patel
- 1999
- Journal of Applied Physics
Solid state ¹³C and ¹H nuclear magnetic resonance investigations of hydrogenated amorphous carbon
- - C. Donnet
  - J. Fontaine
  - et al.
- 1999
- Journal of Applied Physics
EELS analysis of hydrogenated diamond-like carbon films
- - L. Ponsonnet
  - C. Donnet
  - et al.
- 1998
- Thin Solid Films
Integration issues for diamond like carbon in a copper damascene process flow
- - A. Grill
  - C.V. Jahnes
  - et al.
- 1998
- MRS Spring Meeting 1998