Selectively enhanced silicide formation by a gold interlayer: Probing the dominant diffusing species and reaction mechanisms during thin-film reactions
- Chin-An Chang
- Jerng-Sik Song
- 1987
- Applied Physics Letters
Paper
Publications
3 results for Jerng-Sik Song
Effects of Au film on the kinetics of platinum silicide formation
- Jerng-Sik Song
- Chin-An Chang
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperEnhanced PtSi formation using a gold layer between Pt and Si
- Jerng-Sik Song
- Chin-An Chang
- 1987
- Applied Physics Letters
Paper