SURFACE INSPECTION - RESEARCH AND DEVELOPMENT.
- J.S. Batchelder
- 1986
- Electronics Reliability and Measurement Technology 1986
Conference paper
Publications
13 results for J.S. Batchelder
Review of Contamination Detection on Patterned Surfaces
- J. Samuel Batchelder
- 1989
- Proceedings of SPIE 1989
Conference paperNondestructive depth profiling of carrier lifetimes in full silicon wafers
- D. Guidotti
- J.S. Batchelder
- et al.
- 1986
- Applied Physics Letters
Paper