Highly oriented pyrolytic graphite as a reference surface for optically stimulated electron emission surface quality monitors
- Robert J. Baseman
- J. Samuel Batchelder
- 1993
- Review of Scientific Instruments
Publications
13 results for J.S. Batchelder
Evaluating a novel liquid-borne particle counter based on interferometry. Comparing detection of nearly index-matched particles
- J.S. Batchelder
- M.A. Taubenblatt
- 1993
- Microcontamination
Detection and refractive index identification of submicron particles on surfaces
- M.A. Taubenblatt
- J.S. Batchelder
- 1992
- SPIE Applications in Optical Science and Engineering 1992
Patterned wafer inspection using spatial filtering for the cluster environment
- M.A. Taubenblatt
- J.S. Batchelder
- 1992
- Applied Optics
Measurement of the size and refractive index of a small particle using the complex forward-scattered electromagnetic field
- M.A. Taubenblatt
- J.S. Batchelder
- 1991
- Applied Optics
Investigation of particle pairing in liquids
- Douglas W Cooper
- J.Samuel Batchelder
- et al.
- 1991
- Journal of Colloid And Interface Science
Interferometric detection of forward scattered light from small particles
- J.S. Batchelder
- M.A. Taubenblatt
- 1989
- Applied Physics Letters
Modeling of luminescence phase delay for nondestructive characterization of Si wafers
- D. Guidotti
- J.S. Batchelder
- et al.
- 1989
- Journal of Applied Physics
The P300: A system for automatic patterned wafer inspection
- Byron E. Dom
- Virginia H. Brecher
- et al.
- 1988
- Machine Vision and Applications
First-overtone response in modulated photoluminescence emission in silicon at room temperature
- D. Guidotti
- J.S. Batchelder
- et al.
- 1988
- Physical Review B