Publications

15 results for Peter M. Fryer

Tungsten-rhenium alloys as diffusion barriers between aluminum and silicon
- - S.-E. Hörnström
  - T. Lin
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Relationship between substrate bias and microstructure in magnetron-sputtered AlCu films
- - T. Lin
  - K.Y. Ahn
  - et al.
- 1987
- Thin Solid Films
HIGH TEMPERATURE PROCESS LIMITATIONS ON TiSi//2.
- - C.-Y. Ting
  - F.M. d'Heurle
  - et al.
- 1984
- ECS Meeting 1984
AMBIENT GAS EFFECTS ON THE REACTION OF TITANIUM WITH SILICON.
- - Subramanian S. Iyer
  - C.-Y. Ting
  - et al.
- 1983
- VLSI Science and Technology 1983
AMBIENT GAS EFFECTS ON THE REACTION OF TITANIUM WITH SILICON.
- - Subramanian S. Iyer
  - C.-Y. Ting
  - et al.
- 1983
- ECS Meeting 1983