"Laser cleaning" removes particles from surfaces
- W. Zapka
- Winfrid Ziemlich
- et al.
- 1993
- Microelectronic Engineering
Paper
Publications
21 results for W. Zapka
Laser cleaning: Laser‐induced removal of particles from surfaces
- W. Zapka
- Winfrid Ziemlich
- et al.
- 1993
- Advanced Materials for Optics and Electronics
PaperLaser-cleaning techniques for removal of surface particulates
- Andrew C. Tam
- Wing P. Leung
- et al.
- 1992
- Journal of Applied Physics
PaperTransmission studies of explosive vaporization of a transparent liquid film on an opaque solid surface induced by excimer-laser-pulsed irradiation
- P.T. Leung
- Nhan Do
- et al.
- 1992
- Journal of Applied Physics
PaperLiquid film enhanced laser cleaning
- W. Zapka
- A.C. Tam
- et al.
- 1992
- Microelectronic Engineering
PaperEfficient pulsed laser removal of 0.2 μm sized particles from a solid surface
- W. Zapka
- Winfrid Ziemlich
- et al.
- 1991
- Applied Physics Letters
PaperEfficient laser cleaning of small particulates using pulsed laser irradiation synchronized with liquid-film deposition
- A.C. Tam
- W. Zapka
- et al.
- 1991
- SPIE Microelectronic Processing Integration 1991
Conference paperLaser cleaning of wafer surfaces and lithography masks
- W. Zapka
- A.C. Tam
- et al.
- 1991
- Microelectronic Engineering
PaperPicosecond laser sputtering of sapphire at 266 nm
- A.C. Tam
- J.L. Brand
- et al.
- 1989
- Applied Physics Letters
PaperFlame diagnostic using optoacoustic laserbeam deflection and frequency modulation spectroscopy
- W. Zapka
- P. Pokrowsky
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paper