Fully scaled 0.5μm MOS circuits by synchrotron radiation X-ray lithography: Mask fabrication and chraterization
- R. Viswanathan
- R.E. Acosta
- et al.
- 1989
- Microelectronic Engineering
Publications
16 results for J.R. Maldonado
Electrical resistivity and radiation damage in boro-hydro-nitride x-ray lithography mask substrates
- S.S. Dana
- J. Batey
- et al.
- 1987
- Microelectronic Engineering
Generation and annealing of defects in silicon dioxide
- A. Reisman
- C.K. Williams
- et al.
- 1987
- Journal of Applied Physics
Distortion of masks for x-ray lithography
- R.E. Acosta
- J.R. Maldonado
- et al.
- 1985
- Microelectronic Engineering
B-Si masks for storage ring x-ray lithography
- R.E. Acosta
- J.R. Maldonado
- et al.
- 1989
- Proceedings of SPIE 1989
Trends in x-ray lithography
- Juan R. Maldonado
- 1989
- Proceedings of SPIE 1989