Publications

3 results for R.T. Kerth

EXCIMER LASER PROJECTION LITHOGRAPHY ON A FULL-FIELD SCANNING PROJECTION SYSTEM.
- - R.T. Kerth
  - K. Jain
  - et al.
- 1986
- IEEE Electron Device Letters
Excimer laser projection lithography
- - K. Jain
  - R.T. Kerth
- 1984
- Applied Optics
Electrophotographic laser copier printer scanner
- - W. Imaino
  - R.T. Kerth
  - et al.
- 1989
- Proceedings of SPIE 1989