Paper

01 Mar 1984

Excimer laser projection lithography

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Abstract

No abstract available.

Paper

EXCIMER LASER PROJECTION LITHOGRAPHY ON A FULL-FIELD SCANNING PROJECTION SYSTEM.

R.T. Kerth, K. Jain, et al.

IEEE Electron Device Letters

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Electrophotographic laser copier printer scanner

W. Imaino, R.T. Kerth, et al.

Proceedings of SPIE 1989

Paper

Phase-matched second-harmonic generation at 440 nm in a LiNbO₃ -Gd₃Ga₅O₁₂ waveguide with a tunable stimulated Raman source

K. Jain, G.H. Hewig

Optics Communications

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Ultrafast high resolution contact lithography using excimer lasers

K. Jain, B.J. Lin

Proceedings of SPIE 1989

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