Publications

13 results for E.J. Petrillo

Parameter and Reactor Dependence of Selective Oxide RIE in CF₄ + H₂
- - L.M. Ephroth
  - E.J. Petrillo
- 2019
- JES
Sidewall Spacer Technology for MOS and Bipolar Devices
- - Sang H. Dhong
  - Edward J. Petrillo
- 2019
- JES
Near-Surface Damage and Contamination after CF₄/H₂ Reactive Ion Etching of Si
- - G.S. Oehrlein
  - R.M. Tromp
  - et al.
- 2019
- JES
A low-power static frequency divider circuit in bipolar technology
- - Kai Y. Toh
  - Yen C. Tzeng
  - et al.
- 1992
- BCTM 1992
A Scaled 0.25- μm Bipolar Technology Using Full e-Beam Lithography
- - John D. Cressler
  - James Warnock
  - et al.
- 1992
- IEEE Electron Device Letters
A novel high-performance lateral bipolar on SOI
- - G. Shahidi
  - D.D. Tang
  - et al.
- 1991
- IEDM 1991
A full E-beam 0.25 mu m bipolar technology with sub-25 ps ECL gate delay
- - J. Warnock
  - J.D. Cressler
  - et al.
- 1991
- IEDM 1991
High-Performance Bipolar Technology for Improved ECL Power Delay
- - J. Warnock
  - J.D. Cressler
  - et al.
- 1991
- IEEE Electron Device Letters
SiGe-base PNP transistors fabricated with N-type UHV/CVD LTE in a 'No Dt' process
- - D.L. Harame
  - J.M.C. Stork
  - et al.
- 1990
- VLSI Technology 1990
A Highly Latchup-Immune 1-μm CMOS Technology Fabricated with 1-MeV Ion Implantation and Self-Aligned TiSi₂
- - Fang-Shi J. Lai
  - L.K. Wang
  - et al.
- 1986
- IEEE T-ED