Characterization of stress in the absorber of x-ray masks using a holographic technique
- R.E. Acosta
- A.D. Wilson
- et al.
- 1985
- Microelectronic Engineering
Paper
Publications
15 results for Alan Wilson
Electron beam pattern writer for x-ray masks
- R. Viswanathan
- A.D. Wilson
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperElectron-Beam Systems for Precision Micron and Submicron Lithography
- Alan D. Wilson
- 1983
- Proceedings of the IEEE
Paper1 μm MOSFET VLSI Technology: Part VI—Electron-Beam Lithography
- Warren D. Grobman
- Hans E. Luhn
- et al.
- 1979
- IEEE T-ED
Paper1 µm MOSFET VLSI Technology: Part VI― Electron-Beam Lithography
- Warren D. Grobman
- Hans E. Luhn
- et al.
- 1979
- IEEE JSSC
Paper