X-ray mask distortion due to radiation damage
- R.E. Acosta
- 1991
- Microelectronic Engineering
Publications
19 results for R.E. Acosta
Reliability and fracture of metal-polymer structures with fine-line geometries
- Shih-Liang Chiu
- Y.H. Jeng
- et al.
- 1990
- ISCAS 1990
0.5 μm CMOS devices and circuits fabricated using synchrotron X-ray lithography
- L.K. Wang
- C.H. Hsu
- et al.
- 1989
- VLSI Technology 1989
Fully scaled 0.5μm MOS circuits by synchrotron radiation X-ray lithography: Mask fabrication and chraterization
- R. Viswanathan
- R.E. Acosta
- et al.
- 1989
- Microelectronic Engineering
Characterization of stress in the absorber of x-ray masks using a holographic technique
- R.E. Acosta
- A.D. Wilson
- et al.
- 1985
- Microelectronic Engineering
Distortion of masks for x-ray lithography
- R.E. Acosta
- J.R. Maldonado
- et al.
- 1985
- Microelectronic Engineering
Electron beam fabrication and characterization of fresnel zone plates for soft x-ray microscopy
- D. Kern
- P. Coane
- et al.
- 1989
- Proceedings of SPIE 1989
B-Si masks for storage ring x-ray lithography
- R.E. Acosta
- J.R. Maldonado
- et al.
- 1989
- Proceedings of SPIE 1989
Coercive force of electrodeposited NiFe on top of conductors for SLM bubble device applications
- L. Romankiw
- M.C. Blakeslee
- et al.
- 1978
- IEEE Transactions on Magnetics