Paper
- T.O. Sedgwick
- P. Agnello
- et al.
- 2019
- JES
Paper
- 2008
- Applied Physics Letters
Paper
- I. Ohdomari
- T.S. Kuan
- et al.
- 2008
- Journal of Applied Physics
Paper
- S. Petersson
- J.E.E. Baglin
- et al.
- 2008
- Journal of Applied Physics
Paper
- S.M. Rossnagel
- Robert L. Wisnieff
- et al.
- 2005
- IEDM 2005
Conference paper
Conference paper
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
- J.Z. Sun
- D.J. Monsma
- et al.
- 2003
- Journal of Applied Physics
Conference paper
- 2002
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper