WP-A7 Some Physical Properties of Dry High-Pressure Oxide Films on Silicon

S.R. Brorson, D.W. Dong, et al.

IEEE Electron Device Letters

D.W. Dong, E.A. Irene, et al.

JES

S.D. Brorson, D.J. DiMaria, et al.

Journal of Applied Physics

E.A. Irene, N.J. Chou, et al.

JES