Water soluble polyanilines: Properties and applications

A new class of water soluble conducting polyanilines have been developed. This is accomplished by oxidatively polymerizing aniline monomers on a template such as a polymeric acid. The resulting polyanilines readily dissolve in water. These materials can be applied as removable discharge layers for electron-beam (e-beam) lithography and for SEM mask metrology. Cross-linkable functionality can be incorporated on the polyaniline backbone resulting in water soluble polyanilines that are radiation curable. Upon irradiation these materials cross-link and become insoluble and thus can be utilized as permanent conducting coatings for electrostatic discharge (ESD) applications. In addition, the cross-linkable polyanilines can be made into water developable conducting resists. 1.0 μm conducting lines have been patterned with e-beam irradiation.