Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We investigate the conductance properties of double-barrier quantum well resonant tunneling heterostructures, laterally confined by a Schottky gate such that the confinement can be varied in a continuous and controlled way. Data on dots with nominal diameters in the submicron range are reported. © 1992.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R. Ghez, J.S. Lew
Journal of Crystal Growth
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
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Journal of Physics and Chemistry of Solids