Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The equations of multiple-scattering theory (MST) are solved for the case of a lattice of square-well potentials in the shape of squares that fill the plane. We find that multiple-scattering theory is exact within reasonably achievable numerical accuracy. There is a problem with the convergence of MST in its traditional formulation that has obscured the fact that it is an exact theory even for non-muffin-tin, space-filling potentials. We show that this problem can be easily circumvented and describe a rapidly convergent, exact formulation of MST. © 1990 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
Ming L. Yu
Physical Review B