Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Pulsed nuclear resonance with small Al particles reveals two echo maxima for the pulse sequence 90° - τ - φ{symbol} at φ{symbol}'s of 40° and 180°. The echoes can be understood by considering static electric field gradients as well as magnetic perturbations. The perturbation distribution functions can be extracted. © 1965.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
P. Alnot, D.J. Auerbach, et al.
Surface Science
M.A. Lutz, R.M. Feenstra, et al.
Surface Science
J.C. Marinace
JES