J. Fassbender, R. Allenspach, et al.
Surface Science
A scheme is described that resolves the problem of coupling sensitive equipment to a heat exchanger while retaining excellent isolation against vibrations in an ultrahigh vacuum environment.
J. Fassbender, R. Allenspach, et al.
Surface Science
A. Stalder, U. Dürig
Applied Physics Letters
M. Hinz, A. Kleiner, et al.
European Polymer Journal
A. Stalder, U. Dürig
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures