O. Züger, U. Dürig
Physical Review B
Paper
Ultrahigh vacuum compatible cooling and vibration isolation stage
Abstract
A scheme is described that resolves the problem of coupling sensitive equipment to a heat exchanger while retaining excellent isolation against vibrations in an ultrahigh vacuum environment.
Related
D. Pohl, U.Ch. Fischer, et al.
Journal of Microscopy
O. Wolter, J. Greschner, et al.
Microelectronic Engineering
A.W. Knoll, U. Dürig, et al.
Microelectronic Engineering