U.C. Fischer, U. Dürig
Proceedings of SPIE 1989
A scheme is described that resolves the problem of coupling sensitive equipment to a heat exchanger while retaining excellent isolation against vibrations in an ultrahigh vacuum environment.
U.C. Fischer, U. Dürig
Proceedings of SPIE 1989
P. Grütter, U. Dürig
Physical Review B
A.W. Knoll, P. Bächtold, et al.
Microelectronic Engineering
A. Stalder, U. Dürig
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures