Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
No abstract available.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
F. Odeh, I. Tadjbakhsh
Archive for Rational Mechanics and Analysis
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ICLR 2026
Martin C. Gutzwiller
Physica D: Nonlinear Phenomena