Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
No abstract available.
J. LaRue, C. Ting
Proceedings of SPIE 1989
John R. Kender, Rick Kjeldsen
IEEE Transactions on Pattern Analysis and Machine Intelligence
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SPIE Optical Science, Engineering, and Instrumentation 1998
T. Graham, A. Afzali, et al.
Microlithography 2000