W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
No abstract available.
W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
F. Odeh, I. Tadjbakhsh
Archive for Rational Mechanics and Analysis
J. LaRue, C. Ting
Proceedings of SPIE 1989