Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
No abstract available.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Zhengxin Zhang, Ziv Goldfeld, et al.
Foundations of Computational Mathematics
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991