Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
This paper introduces a model called the parallel program schema for the representation and study of programs containing parallel sequencing. The model is related to Ianov's program schema, but extends it, both by modelling memory structure in more detail and by admitting parallel computation. The emphasis is on decision procedures, both for traditional properties, such as equivalence, and for new properties particular to parallel computation, such as determinacy and boundedness. © 1969 Academic Press, Inc.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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UAI 2011
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
F. Odeh, I. Tadjbakhsh
Archive for Rational Mechanics and Analysis