Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
It is shown that there is a positive lower bound, c, to the uniform error in any scheme designed to recover all functions of a certain smoothness from their values at a fixed finite set of points. This lower bound is essentially attained by interpolation at the points by splines with canonical knots. Estimates of c are also given. © 1976 Springer-Verlag.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
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