The chemisorption of SiCl4, Si2Cl6 and chlorine on Si(111) 7 × 7

Paper

01 Jan 1990

The chemisorption of SiCl₄, Si₂Cl₆ and chlorine on Si(111) 7 × 7

No abstract available.

Conference paper

Corneliu Constantinescu

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ACS Nano

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SPIE Advanced Lithography 2007

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