P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The photochemical attachment of functional group of liquid crystal process in the presence of chemical vapor are discussed. A patternable surface chemical property modification scheme by photochemical attachment of a functional group was found. The source of the functional group was supplied as a gas phase material. This scheme can be applied to a photo alignment of liquid crystal display to control its pretilt angle.
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
J. Tersoff
Applied Surface Science
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry