Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
01 Jan 1988

Summary Abstract: Desorption dynamics of SiF4etch product

View publication

Abstract

No abstract available.

Related

Paper

Crystal structure and cation distribution of MnCrInS4 from synchrotron powder diffraction data

G. Will, N. Masciocchi, et al.

Zeitschrift fur Kristallographie - New Crystal Structures

Paper

Studies of Chain Conformational Kinetics in Poly(di-n-alkylsilanes) by Spectroscopic Methods. 4. Piezochromism in Symmetrical Poly(di-n-alkylsilanes)

Kigook Song, Robert D. Miller, et al.

Macromolecules

Paper

Anomalous large grains in alloyed aluminum thin films I. Secondary grain growth in aluminum-copper films

A. Gangulee, F.M. D'Heurle

Thin Solid Films

Conference paper

Interface state generation in pFETs with ultra-thin oxide and oxynitride on (100) and (110) Si substrates

J.H. Stathis, R. Bolam, et al.

INFOS 2005

View all publications
  1. Home
  2. ↳ Publications

Date

01 Jan 1988

Publication

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Authors

  • F.A. Houle
IBM-affiliated at time of publication

Topics

  • Physical Sciences
  • Materials Discovery

Resources

  • Publication

Share