Sub-μm linewidth input coils for low T_c integrated thin-film dc superconducting quantum interference devices

We have, for the first time, demonstrated integrated dc superconducting quantum interference devices (SQUIDs) with input coils of linewidth down to 0.5 μm. The SQUID inductance L consists of a single octagonal washer or two or four such washers configured in parallel. The input coil of inductance L i, which couples to L with a mutual inductance of Mi, consists of fine-line octagonal spiral(s) fabricated in close proximity to the washer(s). For a two-washer SQUID with twin 80-turn, 0.5 μm spirals, L i=2.5 μH, Mi=12.7 nH, L=109 pH, and the coupling constant k2=0.85. This entire device occupies an area of less than 0.2 mm2.