Conference paper
RAPID ANNEALING OF SILICON.
R.T. Hodgson, V.R. Deline, et al.
MRS Proceedings 1983
No abstract available.
R.T. Hodgson, V.R. Deline, et al.
MRS Proceedings 1983
S. Mader, S.R. Herd
Journal of Applied Physics
S. Mader, S.R. Herd
Thin Solid Films
P. Chaudhari, S. Mader
Applied Physics Letters