Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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We report here the first surface X-ray diffraction study of self-assembled monolayers on gold(111), providing new information about both in-plane and out-of-plane structure, and substantiating the high degree of order, both in the film and in its relation to the gold substrate. © 1991, American Chemical Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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