Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Let K be a subspace of Rn and let K⊥ be the orthogonal complement of K. Rockafellar has shown that certain properties of K may be characterized by considering the possible patterns of signs of the nonzero components of vectors of K and of K⊥. Such considerations are shown to lead to the standard characterization theorem for discrete linear Chebyshev approximation as well as to several results on uniqueness of solutions. A method is given for testing uniqueness of a given solution. A special case related to graph theory is discussed and combinatorial methods are given for solving and testing for uniqueness. © 1976.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
T. Graham, A. Afzali, et al.
Microlithography 2000
Tong Zhang, G.H. Golub, et al.
Linear Algebra and Its Applications
Fausto Bernardini, Holly Rushmeier
Proceedings of SPIE - The International Society for Optical Engineering